PS系列真空泵詳細介紹如下：

1、結構簡單、故障率低、成本較低，易維修。

2、高壓端功耗相對低，適用于高負載運用場合。

3、排氣路徑短，減少反應物沉積。 適用于一般真空鍍膜、烤箱、熱處理、太陽能產業、半導體面板業制程

水冷系統Water Cooling System：

水冷卻系統通過外接冷卻水冷卻泵體,最大限度的保護了真空泵，避免了溫度過高對泵產生的不良影響；

The water cooling system uses the fresh cooling water to cool the pump case, it mostly protect the pump damage from the higher temperature.

冷卻水流量：不少于6L/min@15℃～10 L/min@30℃

  Cooling water: No less than 6L/min@15℃～10 L/min@30℃

 冷卻水進水溫度：15~30℃

 Temperature of the cooling water supply: 15~30℃

 冷卻水供水壓力：2-4 bar，排水無背壓

 Pressure of the cooling water supply: 2-4 bar, water return no pressure

 

氮氣吹掃系統Nitrogen purge system

進氣口氣體吹掃接口，可根據實際工藝情況選擇使用。干燥氮氣吹掃有利于幫助將可凝性氣體徹底排出。也可用于低溫條件下幫助預熱真空泵。

One port for pump stop purge at the pump inlet, customer can choose use it or not. Nitrogen purge is helpful for removing the condensate, and it also can help to warm the pump under low temperature.

氮氣密封保護可有效防止工藝氣體從泵腔密封處泄漏到油箱使潤滑油性能下降造成對泵的損壞。

Nitrogen-sealed protection purge can prevent the process gas leaking to the oil box then damage the pump by decreasing the capability of the oil.

-氮氣吹掃管路路附件Nitrogen purge system piping connection：

N2 pressure gauge

N2 pressure regulator

 排氣消音器及排氣止回閥， Discharge silencer and Discharge check valve

排出管路配有不銹鋼消音器，降低噪音.排氣止回閥，防止氣體返流。

Discharge silencer at discharge line will reduce noise and discharge check valve avoid the gas sucked back